JPH074110Y2 - 研磨治具 - Google Patents
研磨治具Info
- Publication number
- JPH074110Y2 JPH074110Y2 JP1989052322U JP5232289U JPH074110Y2 JP H074110 Y2 JPH074110 Y2 JP H074110Y2 JP 1989052322 U JP1989052322 U JP 1989052322U JP 5232289 U JP5232289 U JP 5232289U JP H074110 Y2 JPH074110 Y2 JP H074110Y2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- plane
- crystal
- jig
- polishing jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title claims description 47
- 239000013078 crystal Substances 0.000 claims description 38
- 238000000034 method Methods 0.000 description 25
- 238000012937 correction Methods 0.000 description 20
- 238000005162 X-ray Laue diffraction Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 3
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 239000011630 iodine Substances 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989052322U JPH074110Y2 (ja) | 1989-05-01 | 1989-05-01 | 研磨治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989052322U JPH074110Y2 (ja) | 1989-05-01 | 1989-05-01 | 研磨治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02143144U JPH02143144U (en]) | 1990-12-05 |
| JPH074110Y2 true JPH074110Y2 (ja) | 1995-02-01 |
Family
ID=31572530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989052322U Expired - Lifetime JPH074110Y2 (ja) | 1989-05-01 | 1989-05-01 | 研磨治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH074110Y2 (en]) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52120493A (en) * | 1976-04-03 | 1977-10-08 | Koga Tadashi | Grinding machine |
| JPS5511516U (en]) * | 1978-07-07 | 1980-01-24 |
-
1989
- 1989-05-01 JP JP1989052322U patent/JPH074110Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02143144U (en]) | 1990-12-05 |
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